Apparatus and method for heating substrate and coating and...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

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C118S724000

Reexamination Certificate

active

08080765

ABSTRACT:
A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface. When heating the substrate, a gas flow flowing through the space between the hot plate and the top plate is generated.

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Japanese Office Action issued Oct. 14, 2009 for Japanese Application No. 2005-121267 w/ English language translation.
“Regarding duty to disclose information to the USPTO” dated Jul. 26, 2010 (4 pages).

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