Apparatus and method for handling, storing and reloading...

Classifying – separating – and assorting solids – Sorting special items – and certain methods and apparatus for... – Condition responsive means controls separating means

Reexamination Certificate

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C209S573000, C414S937000

Reexamination Certificate

active

06881914

ABSTRACT:
An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.

REFERENCES:
patent: 5698040 (1997-12-01), Guldi et al.
patent: 5972727 (1999-10-01), Ryan et al.
patent: 5991965 (1999-11-01), Stroh et al.
patent: 6096100 (2000-08-01), Guldi et al.
patent: 6280134 (2001-08-01), Nering
patent: 0 335 752 (1989-10-01), None
patent: 05326476 (1993-12-01), None
patent: WO 9918603 (1999-04-01), None
patent: WO 0022653 (2000-04-01), None
Author not listed: “Sorting and Transfer Drive Mechanism”, IBM Technical Disclosure Bulletin, vol. 33, No. 6A, Nov. 1990, pp. 134-143.
Sherwood E. et al.: “Integrated Minienvironment Design Best Practices”, International Sematech, Technology Transfer # 99033693A-ENG, Mar. 1999, pp. 1-14.

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