Radiant energy – Ion generation – Field ionization type
Patent
1982-03-08
1984-09-11
Howell, Janice A.
Radiant energy
Ion generation
Field ionization type
H01J 2720
Patent
active
044712243
ABSTRACT:
Method and apparatus for generating high current, negative ion beams. A plasma source of ions of one charge polarity includes an accelerator for accelerating the ions toward a target having a plurality of apertures. An electric field directs the ions exiting the apertures against a target surface which is arranged to emit ions of an opposite polarity. The electric field directs the opposite polarity ions away from the target forming a stream of oppositely charged ions.
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Cuomo Jerome J.
Kaufman Harold R.
Hannaher Constantine
Howell Janice A.
International Business Machines - Corporation
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