Apparatus and method for forming pattern

Details Apparatus and method for forming pattern Apparatus and method for forming pattern

2006-05-02

2006-05-02

McPherson, John A. (Department: 1756)

Thermal measuring and testing

Temperature measurement

Temperature distribution or profile

C374S100000, C374S120000, C355S030000, C355S072000, C250S492220, C250S492300, C430S330000, C430S942000

Reexamination Certificate

active

07036980

ABSTRACT:
A pattern forming apparatus includes a drawing chamber having a drawing substrate on which an original pattern is drawn, a first temperature control unit having a first temperature regulator to make the temperature of the drawing chamber constant, and a constant-temperature member arranged near the drawing substrate. The pattern forming apparatus further includes a second temperature control unit having a second temperature regulator. The second temperature control unit is configured to control the set temperature of the constant-temperature member independently such that the temperature of the drawing substrate becomes substantially constant when the original pattern is drawn.

REFERENCES:
patent: 5231291 (1993-07-01), Amemiya et al.
patent: 6676289 (2004-01-01), Hirano et al.

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