Apparatus and method for forming coating film

Details Apparatus and method for forming coating film Apparatus and method for forming coating film

2006-01-03

2006-01-03

Lamb, Brenda A. (Department: 1734)

Coating apparatus

With means to centrifuge work

C118S320000

Reexamination Certificate

active

06982002

ABSTRACT:
The apparatus of the present invention for forming a coating film on a substrate by applying a coating liquid to the substrate comprises: a spin chuck for holding the substrate; a motor for rotating the spin chuck; and a nozzle for dropping the coating liquid on the center surface of the substrate. The nozzle included a spiral groove or a plurality of fins for giving a gyrating force to the dropped coating liquid.

REFERENCES:
patent: 3297474 (1967-01-01), Shields
patent: 3920187 (1975-11-01), Willis
patent: 4603813 (1986-08-01), Luegering
patent: 4806455 (1989-02-01), LaBianca
patent: 5069156 (1991-12-01), Suzuki
patent: 5968268 (1999-10-01), Kitano et al.
patent: 6059880 (2000-05-01), Kitano et al.
patent: 6376013 (2002-04-01), Rangarajan et al.

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