Coating processes – Centrifugal force utilized
Patent
1980-08-25
1983-05-24
Lusignan, Michael R.
Coating processes
Centrifugal force utilized
118 50, 118 52, 118500, 118501, 118503, B05D 312, B05D 300, C23C 1308, B05C 1102
Patent
active
043850839
ABSTRACT:
Apparatus for forming a thin film of a coating material on a selected surface of a substrate and having a rotatable head fixture for supporting the substrate which includes a platen housing having a hollowed-out central area and an opening extending from an upper surface thereof into the hollowed-out central area, a substrate support means formed in the platen housing for supporting a substrate above the opening in the platen housing; means defining a chamber which encloses the substrate supporting means, the opening and part of the platen housing surface and wherein the chamber defining means is positioned relative to the periphery of the substrate to form a controlled gap which communicates with the opening and hollowed-out area; rotating means for rotating the platen housing and substrate at a predetermined rate of rotation and means for applying a vacuum through the hollowed-out area and opening to the controlled gap to draw and remove excess accumulation of coating material from the edge of the substrate formed thereon during rotation thereof by the rotating means is shown. A method for forming a thin film of coating material on a substrate by using a vacuum for removing excess coating material from the substrate during rotation thereof is shown.
REFERENCES:
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patent: 3389682 (1968-06-01), Gardner
patent: 3426727 (1969-02-01), Balain et al.
patent: 3538883 (1970-11-01), Polin
patent: 3695928 (1972-10-01), Boyer et al.
patent: 3705048 (1972-12-01), Staunton
patent: 3834613 (1974-10-01), Hankey
patent: 3993018 (1976-11-01), Kranik et al.
Applied Magnetics Corporation
Bell Janyce A.
Lusignan Michael R.
Meaney, Jr. Daniel J.
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