Apparatus and method for forming a film on a tape substrate

Details Apparatus and method for forming a film on a tape substrate Apparatus and method for forming a film on a tape substrate

1999-09-29

2000-11-14

Bueker, Richard

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

4272555, 427567, 118712, 118718, 118719, C23C 1400

Patent

active

061470333

ABSTRACT:
This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.

REFERENCES:
patent: 5741377 (1998-04-01), Goyal et al.
patent: 5846911 (1998-12-01), Freghardt
patent: 5863336 (1999-01-01), Tkaczyk
M. Paranthaman et al., Growth of biaxially textured buffer layers on rolled-Ni substrates by electron beam evaporation, Physica C, 275, (1997), pp. 266-272.

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