Electric resistance heating devices – Heating devices – Radiant heater
Patent
1997-07-11
1999-09-28
Pelham, Jospeh
Electric resistance heating devices
Heating devices
Radiant heater
219390, 219405, 374126, G01J 506, F27B 514, F27B 518
Patent
active
059601582
ABSTRACT:
The present invention is directed to an apparatus and process for filtering light in a thermal processing chamber. In particular, the apparatus of the present invention includes a first spectral filter spaced apart from a second spectral filter. The first spectral filter is spaced apart from the second spectral filter so as to define a cooling fluid channel therebetween through which a cooling fluid can be circulated. In order to prevent thermal radiation being emitted by the light source from interfering with the operation of a radiation sensing device contained in the chamber, the first spectral filter absorbs most of the thermal radiation being emitted by the light source at the operating wavelength of the radiation sensing device. The second spectral filter, on the other hand, is substantially transparent to thermal radiation at the operating wavelength of the radiation sensing device. If desired, various reflective coatings made from dielectric materials can also be applied to selected surfaces of the spectral filters to further prevent unwanted thermal radiation from being detected by the radiation sensing device and for preventing the spectral filters from increasing in temperature during operation of the chamber.
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Champetier Robert J.
Fabian Ram Z.
Gat Arnon
AG Associates
Pelham Jospeh
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