Abrading – Machine – Sandblast
Reexamination Certificate
2006-05-30
2006-05-30
Rachuba, M. (Department: 3723)
Abrading
Machine
Sandblast
C451S099000, C451S100000
Reexamination Certificate
active
07052377
ABSTRACT:
A slurry feeding apparatus includes closed slurry bottle, piping, wet nitrogen generator, wet nitrogen supply pipe, suction and spray nozzles, temperature regulator, flow rate control valves, slurry delivery pump and controller for controlling the operation and flow rate of the slurry delivery pump. While a wafer is being polished by a CMP polisher, the controller continuously operates the pump. On the other hand, while the polisher is idling, the controller starts and stops the pump intermittently at regular intervals. No stirrer like a propeller is inserted into the slurry bottle, but the slurry is stirred up by spraying the slurry through the spray nozzle.
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Hashimoto Shin
Hidaka Yoshiharu
Tanoue Akihiro
Nixon & Peabody LLP
Rachuba M.
Studebaker Donald R.
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