Coating apparatus – With means to centrifuge work
Reexamination Certificate
2005-04-05
2005-04-05
Lamb, Brenda A. (Department: 1734)
Coating apparatus
With means to centrifuge work
C118S412000
Reexamination Certificate
active
06875276
ABSTRACT:
An apparatus and method for fabricating a thin layer periodic structure by successively depositing alternating uniform layers of two or more different dielectric materials on a substrate utilizing centrifugal force in a novel spin coating technique. In an alternate embodiment of the present invention, the novel spin-coating technique is configured for fabricating chiral media by successively depositing layers of one or more anisotropic materials, while rotating the substrate by a predetermined angle between deposition of each layer. In both embodiments of the inventive apparatus, a defect layer may be introduced by depositing a defect material in a desired position in the media.
REFERENCES:
patent: 4258647 (1981-03-01), Pohl et al.
patent: 4358470 (1982-11-01), Rasmussen
patent: 5095848 (1992-03-01), Ikeno
patent: 5919520 (1999-07-01), Tateyama et al.
Kopp Victor Il'ich
Shibayev Peter
Chiral Photonics, Inc.
Etkin, Esq. Edward
Lamb Brenda A.
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