Apparatus and method for extending the lifetime of an exhaust sl

Details Apparatus and method for extending the lifetime of an exhaust sl Apparatus and method for extending the lifetime of an exhaust sl

1997-04-09

1999-11-30

Beck, Shrive

Coating processes

Interior of hollow article coating

Coating by vapor, gas, mist, or smoke

427230, 42725528, 427255394, 427255395, 117206, 117208, 117213, 117217, B05D 722, C23C 1634, C30B 2700

Patent

active

059939028

ABSTRACT:
An apparatus and a method for preventing buildup of silicon oxides and silicon carbides on the inner surface of exhaust sleeves utilized in Czochralski (Cz) silicon crystal pullers are provided. The apparatus and the method include the provision of a vapor impervious layer coated on the inner surface of an exhaust sleeve, and forming a barrier to silicon oxides and silicon carbides deposition on the inner surface, to prevent the buildup of silicon oxides and silicon carbides on the surface of exhaust sleeves, thereby allowing more uniform laminar flow of process gases in the Cz chamber and the exhaust sleeve, and extending the useful lifetime of exhaust sleeves.

REFERENCES:
patent: 4090851 (1978-05-01), Berkman
patent: 4356152 (1982-10-01), Berkman et al.
patent: 4400232 (1983-08-01), Ownby et al.
patent: 4515755 (1985-05-01), Matsuo et al.
patent: 4565711 (1986-01-01), Pinkhasov
patent: 4633913 (1987-01-01), Carty et al.
patent: 5242531 (1993-09-01), Klingshirn et al.
patent: 5270020 (1993-12-01), Suzuki et al.
patent: 5373805 (1994-12-01), Takano et al.
patent: 5476065 (1995-12-01), Ikezawa et al.
patent: 5578131 (1996-11-01), Ye et al.
patent: 5585914 (1996-12-01), Yamasaki et al.

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