Photocopying – Projection printing and copying cameras – Image transferred to or from curved surface
Patent
1998-04-16
2000-08-01
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Image transferred to or from curved surface
355 53, G03B 2758, G03B 2742
Patent
active
060974729
ABSTRACT:
An exposure apparatus for exposing a pattern on a device material includes a holder for chucking and holding a silicon ball, a spherical reticle on which a hologram of a circuit pattern to be exposed is formed, a light source, a focusing optical system for focusing light emitted by the light source on a first position, and an elliptic mirror having a first focal point at the first position and a second focal point at the central position of the silicon ball (reticle). The center of the reticle coincides with the center of the silicon ball.
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Ina Hideki
Saito Kenji
Sekine Yoshiyuki
Tanaka Nobuyoshi
Canon Kabushiki Kaisha
Metjahic Safet
Nguyen Hung Henry
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