Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-01-04
2008-07-08
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S237500
Reexamination Certificate
active
07397554
ABSTRACT:
An apparatus and method for examining features of a planar, disk-shaped samples on a stage that holdings the sample and has an X-drive, a Y-drive and a θ-drive for rotating the stage about a center of rotation defined in the stage coordinates. The sample is placed on the stage such that the center of the sample is substantially aligned with the center of rotation and a measurement assembly is located above the sample to examine the features optically. A scheduling module coordinates the X-drive, the Y-drive and the θ-drive with the measurement assembly such that the sample is examined in an even number n of angular sectors defined by a sector angle Θ that is the same for each sector. Specifically, the sector angle Θ is defined in terms of n as follows:Θ=360°n,where n=4mand m is an integer, such that a multiple of sector angle Θ always includes angles 90° and 180°.
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Aho Marc
Li Guoguang
Lumen Patent Firm, Inc.
n&k Technology Inc.
Nguyen Sang
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