Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2008-01-29
2008-01-29
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
07324209
ABSTRACT:
A method of detecting non-uniform ellipsometric properties of a substrate surface involving: directing a measurement beam onto a spot at a selected location on or in the substrate; for each orientation of a plurality of different orientations of the reference beam relative to the scattered measurement beam, interfering the scattered measurement beam with the reference beam to produce a corresponding interference beam, wherein each of the different orientations of the reference beam is selected to produce a peak sensitivity for a portion of the scattered measurement beam that emanates from the object at a corresponding different diffraction angle of a plurality of diffraction angles; for each orientation of the reference beam, converting the interference beam into an interference signal; and using the interference signals to determine whether any non-uniform ellipsometric properties are present anywhere within a region on or in the substrate.
REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 4672196 (1987-06-01), Canino
patent: 4685803 (1987-08-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 5220403 (1993-06-01), Batchelder
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt
patent: 5659420 (1997-08-01), Wakai
patent: 5699201 (1997-12-01), Lee
patent: 5757493 (1998-05-01), Vankerkhove
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smith
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 6011654 (2000-01-01), Schweizer et al.
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6124931 (2000-09-01), Hill
patent: 6271923 (2001-08-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6445453 (2002-09-01), Hill
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6469788 (2002-10-01), Boyd et al.
patent: 6480285 (2002-11-01), Hill
patent: 6552805 (2003-04-01), Hill
patent: 6552852 (2003-04-01), Hill
patent: 6597721 (2003-07-01), Hutchinson et al.
patent: 6606159 (2003-08-01), Hill
patent: 6667809 (2003-12-01), Hill
patent: 6714349 (2004-03-01), Nam
patent: 6717736 (2004-04-01), Hill
patent: 6753968 (2004-06-01), Hill
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 6775009 (2004-08-01), Hill
patent: 6847029 (2005-01-01), Hill
patent: 6847452 (2005-01-01), Hill
patent: 2002/0074493 (2002-06-01), Hill
patent: 2002/0131179 (2002-09-01), Hill
patent: 2003/0174992 (2003-09-01), Levene
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201853 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
patent: 2005/0036149 (2005-02-01), Hill
U.S. Appl. No. 09/852,369, filed Jan. 3, 2002, Hill
U.S. Appl. No. 09/917,402, filed Jul. 27, 2001, Hill.
U.S. Appl. No. 10/765,254, filed Jan. 27, 2004, Hill.
U.S. Appl. No. 10/765,368, filed Jan. 27, 2004, Hill.
U.S. Appl. No. 10/886,157, filed Jul. 7, 2004, Hill.
U.S. Appl. No. 60/442,858, filed Jul. 27, 2002, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/443,980, filed Jan. 31, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Jan. 4, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/448,250, filed Jan. 19, 2003, Hill.
U.S. Appl. No. 60/448,360, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/459,493, filed Apr. 1, 2003, Hill.
U.S. Appl. No. 60/480,129, filed Apr. 3, 2003, Hill.
U.S. Appl. No. 60/485,255, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/485,507, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/501,666, filed Sep. 10, 2003, Hill.
U.S. Appl. No. 60/506,715, filed Sep. 26, 2003, Hill.
Silfvast, W. (1995) “Lasers”,Handbook of Optics, New York:: McGraw-Hill, Ch. 11.
Stoicheff, et al. “Tunable, Coherent Sources for High Resolution VUV and XUV Spectroscopy”,Laser Techniques for Extreme Ultraviolet Spectroscopy, p. 19 (1982).
Harris, et al. “Generation of Ultraviolet and Vacuum Ultraviolet Radiation”Laser Spectroscopy, p. 59-75, (1975).
Kung, A.H., “Generation of Tunable Picosecond VUV Radiation”Appl. Phys Lett.25, p. 653 (1974).
D'ariano, et al. “Lower Bounds on Phase Sensitivity in Ideal and Feasible Measurements”Phys. Rev. A49, pp. 3022-3036 (1994).
Turner Samuel A.
Wilmer Cutler Pickering Hale & Dorr LLP
Zetetic Institute
LandOfFree
Apparatus and method for ellipsometric measurements with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for ellipsometric measurements with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for ellipsometric measurements with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2809005