Apparatus and method for electromechanical testing and...

Details Apparatus and method for electromechanical testing and... Apparatus and method for electromechanical testing and...

2005-06-28

2005-06-28

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754090

Reexamination Certificate

active

06911814

ABSTRACT:
A method of testing a probe card includes the step of positioning the probe card in a prober over a verification wafer that is placed on a stage. The probe card is brought in contact with a contact region on the verification wafer. The verification wafer includes a shorting plane surrounding the contact region. A test signal is sent through the verification wafer to the probe card. A response signal from the probe card is received and analyzed.

REFERENCES:
patent: 4918374 (1990-04-01), Stewart et al.
patent: 5561377 (1996-10-01), Strid et al.
patent: 6414477 (2002-07-01), Strom
patent: 6606575 (2003-08-01), Miller
patent: 6622103 (2003-09-01), Miller

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