Coating apparatus – Projection or spray type – Rotating work
Reexamination Certificate
2005-07-05
2005-07-05
Lamb, Brenda A. (Department: 1734)
Coating apparatus
Projection or spray type
Rotating work
C118S064000, C118S052000, C118S321000
Reexamination Certificate
active
06913651
ABSTRACT:
An apparatus of the invention has a closable chamber that can be sealed and is capable of withstanding an increased pressure and high temperature. The chamber contains a substrate holder that can be rotated around a vertical axis, and an edge-grip mechanism inside the substrate holder. The deposition chamber has several inlet ports for the supply of various process liquids, such as deposition solutions, DI water for rinsing, etc., and a port for the supply of a gas under pressure. The apparatus is also provided with reservoirs and tanks for processing liquids and gases, as well as with a solution heater and a control system for controlling temperature and pressure in the chamber. The heater can be located outside the working chamber or built into the substrate holder, or both heaters can be used simultaneously. Uniform deposition is achieved by carrying out the deposition process under pressure and under temperature slightly below the boiling point of the solution. The solution can be supplied from above via a shower head formed in the cover, or through the bottom of the chamber. Rinsing or other auxiliary solutions are supplied via a radially moveable chemical dispensing arm that can be arranged above the substrate parallel thereto.
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Ivanov Igor
Kolics Artur
Zhang Jonathan Weiguo
Blue29 LLC
Daffer McDaniel LLP
Lamb Brenda A.
Lettang Mollie E.
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