Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-11-14
2009-10-27
Nguyen, Nam X (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297030, C205S067000
Reexamination Certificate
active
07608174
ABSTRACT:
A fixture is disclosed to more easily affix a workpiece in the proper orientation and spacing with sealed electrical interconnection within an electrochemical plating bath. The workpiece can be any planar metallic or non-metallic substrate such as a silicon wafer commonly used in LIGA or microsystem fabrication. The fixture described allows the workpiece to be submerged deep within an electrolytic cell, facing upwards, and allows easy transfer from one cell to another. The edges, backside, and electrical connections are sealed and protected from the electrolyte.
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Hachman John T.
Losey Matthew W.
McLean Dorrance E.
Evans Timothy P.
Nguyen Nam X
Sandia Corporation
Van Luan V
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