Apparatus and method for electrical detection and...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C324S754120

Reexamination Certificate

active

07888961

ABSTRACT:
A test structure for localizing shorts in an integrated circuit and method of testing is described. A first comb structure is formed from a first busbar and a first plurality of fingers extending from the first busbar. A second comb structure formed from a second busbar and a second plurality of fingers extending from the second busbar. The second plurality of fingers is interleaved with the first plurality of fingers. A plurality of pass gates is connected between the first plurality of fingers and the first busbar. A pass gate terminal is electrically connected to the gate electrode of each of the plurality of pass gates. When the pass gates are turned OFF thereby disconnecting the first busbar from the first plurality of fingers, voltage contrast imaging can be used to identify which of the first fingers is adjacent the short.

REFERENCES:
patent: 5051690 (1991-09-01), Maly et al.
patent: 5552718 (1996-09-01), Bruce et al.
patent: 6268717 (2001-07-01), Jarvis et al.
patent: 6297644 (2001-10-01), Jarvis et al.
patent: 6348701 (2002-02-01), Joo et al.
patent: 6362634 (2002-03-01), Jarvis et al.
patent: 6452412 (2002-09-01), Jarvis et al.
patent: 6693446 (2004-02-01), Song et al.
patent: 6751519 (2004-06-01), Satya et al.
patent: 6771077 (2004-08-01), Hamamura et al.
patent: 6813572 (2004-11-01), Satya et al.
patent: 6930324 (2005-08-01), Kowalski et al.
patent: 6949765 (2005-09-01), Song et al.
patent: 7024642 (2006-04-01), Hess et al.
patent: 7067335 (2006-06-01), Weiner et al.
patent: 7187179 (2007-03-01), Scaman et al.
patent: 7217579 (2007-05-01), Ben-Porath et al.
patent: 7348594 (2008-03-01), Ciplickas et al.
patent: 7394261 (2008-07-01), Park et al.
patent: 7474107 (2009-01-01), Patterson et al.
patent: 7592827 (2009-09-01), Brozek
patent: 7667477 (2010-02-01), Nagata
patent: 7689948 (2010-03-01), White et al.
patent: 7707528 (2010-04-01), White et al.
patent: 7725845 (2010-05-01), White et al.
patent: 7749778 (2010-07-01), Chanda et al.
patent: 7772590 (2010-08-01), Kuan
patent: 2003/0197523 (2003-10-01), Hamamura et al.
patent: 2004/0207414 (2004-10-01), Verma et al.
patent: 2005/0024077 (2005-02-01), Huang et al.
patent: 2005/0218791 (2005-10-01), Kawase
patent: 2007/0210306 (2007-09-01), Molinelli Acocella et al.
patent: 2007/0296444 (2007-12-01), Zhu et al.
patent: 2009/0002012 (2009-01-01), Doong et al.
Accelerated Analysis, “High Energy Passive Voltage Contrast,” http://www.acceleratedanalysis.com/hepvc.html, Nov. 5, 2006.
Patterson et al., “Detecting resistive shorts and opens using voltage contrast inspection,” Defect/Yield Analysis and Metrology, MICRO: Lead News, MICRO magazine.com, http://www.micromagazine.com/grabber.php3?URL=http:// www.micromagazine.com, Nov. 5, 2006.
Lee et al., “Critical area optimizations improve IC yields,” EETIMES Online, EETimes.com, http://www.eetimes.com/showArticle.jhtml?articleID=175802288, Jan. 9, 2006.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and method for electrical detection and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for electrical detection and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for electrical detection and... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2648400

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.