Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Patent
1997-10-02
1999-09-07
Ngo, Hung N.
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
385131, 20419223, 20419226, G02B 610
Patent
active
059499443
ABSTRACT:
Embodiments of the invention include an apparatus and method for stabilizing the operation of lithium niobate devices such as modulators due to charge accumulation caused by, e.g., pyroelectric and piezoelectride effects. The apparatus comprises a substrate having a waveguide formed therein, a buffer layer formed on the substrate, a Si.sub.2 Ti.sub.x N.sub.8/3+x charge dissipation layer (CDL) formed on the buffer layer and a set of electrodes formed on the charge dissipation layer. According to embodiments of the invention, the Si.sub.2 Ti.sub.x N.sub.8/3+x charge dissipation layer has a resistivity of approximately 15-150 k.OMEGA.cm. Alternatively, the apparatus includes a second charge dissipation layer formed on the opposing surface of the substrate. The charge dissipation layer according to embodiments of the invention is advantageous in that it provides a suitable resistivity and is a composition that is easily reproducible using conventional formation techniques such as sputtering.
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H. Nagata, et al, "Comments on fabrication parameters for reducing thermal drift on LiNb0 sub 3 optical modulators", Society of Photo-Optical Instrumentation Engineers, Jan. 1997, pp. 283-286.
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Minford William James
Sneh Ofer
Harman John M.
Lucent Technologies - Inc.
Ngo Hung N.
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