Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1998-03-12
2000-05-02
Bennett, G. Bradley
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
219497, 219411, 374 9, 374128, G01J 500, G01J 510, G01N 2500, H05B 100
Patent
active
060564342
ABSTRACT:
The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semiconductive wafer, by sensing and measuring the object radiation being emitted at a particular wavelength. In particular, a reflective device is placed adjacent to the radiating object, which causes thermal radiation being emitted by the wafer to be reflected multiple times. The reflected thermal radiation is then monitored using a light detector. Additionally, a reflectometer is contained within the system which independently measures the reflectivity of the object. The temperature of the object is then calculated using not only the thermal radiation information but also the information received from the reflectometer.
REFERENCES:
patent: 3537314 (1970-11-01), Suet
patent: 3630085 (1971-12-01), Roney
patent: 4465382 (1984-08-01), Iuchi et al.
patent: 4511800 (1985-04-01), Harbeke et al.
patent: 4649261 (1987-03-01), Sheets
patent: 4919542 (1990-04-01), Nulman et al.
patent: 4956538 (1990-09-01), Moslehi
patent: 4969748 (1990-11-01), Crowley et al.
patent: 4984902 (1991-01-01), Crowley et al.
patent: 5029117 (1991-07-01), Pattou
patent: 5114242 (1992-05-01), Gat et al.
patent: 5154512 (1992-10-01), Schietinger et al.
patent: 5165796 (1992-11-01), Gat et al.
patent: 5188458 (1993-02-01), Thompson et al.
patent: 5226732 (1993-07-01), Nakos et al.
patent: 5249142 (1993-09-01), Shirakawa et al.
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5271084 (1993-12-01), Vandenabeele et al.
patent: 5305416 (1994-04-01), Fiory
patent: 5308161 (1994-05-01), Stein
patent: 5326173 (1994-07-01), Evans et al.
patent: 5442727 (1995-08-01), Fiory
patent: 5443315 (1995-08-01), Lee et al.
patent: 5444815 (1995-08-01), Lee et al.
patent: 5467220 (1995-11-01), Xu
patent: 5624590 (1997-04-01), Fiory
patent: 5628564 (1997-05-01), Nenyei et al.
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5727017 (1998-03-01), Maurer et al.
patent: 5738440 (1998-04-01), O'Neil et al.
patent: 5769540 (1998-06-01), Schietinger et al.
patent: 5874711 (1999-02-01), Champetier et al.
European Search Report, Jun. 11, 1999, E for EP99104794.
Honda, et al.; New Radiation Thermometry Using Multiple Reflection for Temperature Measurement of Steel Sheets; pp. 923-927; 1992; New York.
Yamamoto, et al.; Radiation Thermometry Method Using Multi-reflection Between Two Parallel Steel sheet Surfaces; pp. 933-938; 1992; New York.
Krapez, et al.; Reflective-cavity Temperature Sensing for Process Control; pp. 877-882; 1992; New York.
Neuer, et al.; Thermal Analysis of the Different Methods of Multiwavelength Pyrometry; pp. 787-789; 1992; New York.
Yamada, et al.; Radiation Thermometry for Simultaneous Measurement of Temperature and Emissivity; pp. 843-847; 1992; New York.
Bennett G. Bradley
Steag RTP Systems, Inc.
Verbitsky Gail
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