Apparatus and method for determining the performance of...

Details Apparatus and method for determining the performance of... Apparatus and method for determining the performance of...

2006-02-14

2006-02-14

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

Reexamination Certificate

active

06998851

ABSTRACT:
An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.

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Goldsmith, C., et al.,Lifetime Characterization of Capacitive RF Mems Switches, 2001 IEEE MIT-S Digest (2001) pp. 227-230.

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