Apparatus and method for determining the minimum zone for an...

Details Apparatus and method for determining the minimum zone for an... Apparatus and method for determining the minimum zone for an...

2007-03-20

2007-03-20

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C703S001000, C703S007000, C700S182000, C700S193000

Reexamination Certificate

active

11239764

ABSTRACT:
A method and apparatus for determining the minimum zone for an array of features with a true position tolerance. In one embodiment, a target function is defined according to a deviation value of each of at least two features from an array of features having a maximum deviation between an actual position and a nominal position. Once defined, the target function is minimized to determine a rotation parameter, a horizontal translation parameter and a vertical translation parameter that provide a minimum target function value as a minimum of the maximum deviation for the array of features. In one embodiment, an inspection report may be generated for the array of features, including at least the minimum, maximum deviation value, as well as the rotation parameter, the horizontal translation parameter and the vertical translation parameter that provide the minimum target function value. Other embodiments are described and claimed.

REFERENCES:
patent: 6507806 (2003-01-01), Tandler

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