X-ray or gamma ray systems or devices – Specific application – Fluorescence
Patent
1996-05-23
1998-04-21
Porta, David P.
X-ray or gamma ray systems or devices
Specific application
Fluorescence
378 45, 378 49, G01T 136
Patent
active
057426589
ABSTRACT:
An apparatus and method are presented for determining the elemental compositions and relative locations of particles on a surface of a semiconductor wafer. An exposed region of the surface of the semiconductor wafer is subjected to a beam of primary X-ray photons, and secondary X-ray photons emitted by atoms of elements on and just under the surface of the semiconductor wafer are detected by an X-ray detector array which includes multiple X-ray detectors. Each X-ray detector produces an output signal which is proportional to energy levels of incident X-ray photons. The X-ray detectors are laterally displaced from one another, and arranged to allow two-dimensional resolution of detected secondary X-ray photons emitted by atoms of elements on the surface of the semiconductor wafer. The X-ray detector array is preferably an electronic area image sensor including a two-dimensional array of photosensor elements formed upon a monolithic semiconductor substrate. With adequate resolution, the X-ray detector array may also provide information as to the relative sizes of particles on the surface of the semiconductor wafer. By virtue of an employed total reflection X-ray fluorescence (TXRF) technique, substantially all of the detected X-ray photons are secondary X-ray photons emitted by atoms of elements located on and just under the exposed surface of the semiconductor wafer.
REFERENCES:
patent: 3859525 (1975-01-01), Ashe et al.
patent: 4131794 (1978-12-01), Bruninx
patent: 4764945 (1988-08-01), Tadahiro
patent: 4819256 (1989-04-01), Annis et al.
patent: 5220591 (1993-06-01), Ohsugi et al.
patent: 5325416 (1994-06-01), Saito et al.
patent: 5430786 (1995-07-01), Komatsu et al.
patent: 5537451 (1996-07-01), Serebryakov et al.
Nomura, et al. "Advances in X-Ray Analysis", (1989) vol. 32, pp. 205-210.
Kosonocky, et al. "Electron. Des.", (Apr. 12, 1975), vol. 23, pp. 58-63.
Janesick, et al. "Optical Engineering", (Aug. , 1987), vol. 26, No. 8, pp. 692-714.
Bower, "CCD-Solid State Imaging Technology", (1982 Catalog), pp. 121-125.
Amelio "CCD-Solid State Imaging Technology", (1982 Catalog), pp. 126-137.
Hossain Tim Z.
Tiffin Donald A.
Advanced Micro Devices , Inc.
Daffer Kevin L.
Porta David P.
LandOfFree
Apparatus and method for determining the elemental compositions does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for determining the elemental compositions , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for determining the elemental compositions will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2066222