Apparatus and method for determining physical properties of...

Details Apparatus and method for determining physical properties of... Apparatus and method for determining physical properties of...

2007-10-30

2007-10-30

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

C356S032000, C356S337000, C356S432000, C356S237100, C356S239100, C250S559400, C382S144000

Reexamination Certificate

active

10744067

ABSTRACT:
An apparatus for determining physical properties of a mask blank. The apparatus includes, for example, an illumination device for radiating a predetermined light laterally into the mask blank, a detection device opposite the illumination device for detecting the light which has been scattered and/or runs through the mask blank, and an evaluation device for determining predetermined properties of the mask blank from the light which has been scattered and/or has run through the mask blank and has been detected in the detection device. The present invention likewise provides a method for determining physical properties of a mask blank.

REFERENCES:
patent: 4610541 (1986-09-01), Tanimoto et al.
patent: 4958083 (1990-09-01), Sakamoto
patent: 6479196 (2002-11-01), Levenson
patent: 6627362 (2003-09-01), Stivers et al.
patent: 6858859 (2005-02-01), Kusunose
patent: 2005/0057747 (2005-03-01), Meeks
patent: 09260468 (1997-10-01), None

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