Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-05-17
2005-05-17
Zarneke, David (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S719000
Reexamination Certificate
active
06894519
ABSTRACT:
An apparatus for measuring an electrical property of a semiconductor wafer includes a probe having an electrically conductive tip formed at least in part of a material that is transparent to light and a probe guard disposed adjacent the electrically conductive tip. The apparatus includes a device for selectively applying a first electrical stimulus between a semiconductor wafer and the electrically conductive tip of each probe when it is positioned in spaced relation to the semiconducting material forming the semiconductor wafer, and a device for selectively applying a second electrical stimulus between the semiconductor wafer and the probe guard of each probe. A device for measuring a response of the semiconductor wafer to the electrical stimuli and for determining from the response at least one electrical property thereof is provided. A light source can be positioned to selectively emit light through the transparent material toward the semiconductor wafer.
REFERENCES:
patent: 4494069 (1985-01-01), Lin
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4841234 (1989-06-01), Aoshima et al.
patent: 4859939 (1989-08-01), Gittleman et al.
patent: 4866372 (1989-09-01), Aoshima et al.
patent: 4891580 (1990-01-01), Valdmanis
patent: 4891584 (1990-01-01), Kamieniecki et al.
patent: 5023561 (1991-06-01), Hillard
patent: 5331275 (1994-07-01), Ozaki et al.
patent: 5412330 (1995-05-01), Ravel et al.
patent: 5416429 (1995-05-01), McQuade et al.
patent: 5430305 (1995-07-01), Cole et al.
patent: 5465043 (1995-11-01), Sakai
patent: 5500607 (1996-03-01), Verkuil
patent: 5508627 (1996-04-01), Patterson
patent: 5550479 (1996-08-01), Wakana et al.
patent: 5554939 (1996-09-01), Hirae et al.
patent: 5596207 (1997-01-01), Krishnan et al.
patent: 5650731 (1997-07-01), Fung et al.
patent: 5767691 (1998-06-01), Verkuil
patent: 5880360 (1999-03-01), Hu et al.
patent: 5943552 (1999-08-01), Koveshnikov et al.
patent: 6011404 (2000-01-01), Ma et al.
patent: 6054393 (2000-04-01), Niccoli
patent: 6163162 (2000-12-01), Thiessen et al.
patent: 6177291 (2001-01-01), Eriguchi et al.
patent: 6181144 (2001-01-01), Hembree et al.
patent: 6417673 (2002-07-01), Kleiman et al.
patent: 6492827 (2002-12-01), Mazur et al.
patent: 6632691 (2003-10-01), Howland
patent: 6741093 (2004-05-01), Howland et al.
patent: 6788076 (2004-09-01), Howland
patent: 20040008033 (2004-01-01), Howland
Hollington Jermele
Solid State Measurements, Inc.
The Webb Law Firm
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