Apparatus and method for detecting vertically propagated defects

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158T, 437 8, G01R 3102

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active

050516906

ABSTRACT:
Vertically propagated defects in integrated circuits are detected utilizing an apparatus which includes a first meander structure formed on or in a substrate and a second meander structure electrically insulated from the first meander. Each meander includes intermediate segments, the ends of which are interconnected by folded segments. A first set metal of strips are electrically insulated from the first and second meanders. The ends of each strip in the first set are electrically connected to the ends of a corresponding intermediate segment of the first meander. A second set metal or strips are electrically insulated from the first set of strips, the first meander and the second meander. The ends of each strip in the second set are electrically connected to the ends of a corresponding intermediate segment of the second meander and at least a portion of the second set of strips overlies at least a portion of the first set of strips.

REFERENCES:
patent: 4144493 (1979-03-01), Lee et al.
patent: 4386459 (1983-06-01), Boulin
patent: 4516071 (1985-05-01), Buehler
patent: 4542340 (1985-09-01), Chakrowarti et al.
patent: 4835466 (1989-05-01), Maly et al.

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