Coherent light generators – Particular active media – Semiconductor
Patent
1990-03-28
1992-08-04
Davie, James W.
Coherent light generators
Particular active media
Semiconductor
372 45, 372 46, H01S 319
Patent
active
051366045
ABSTRACT:
The present invention is an apparatus and method for providing detection of a laser output on a semiconductor wafer. A laser cavity and a detection cavity are formed on a semiconductor wafer in parallel such that light emitted laterally from the laser cavity is detected by the detection cavity. The amount of light detected can then be transformed into data, which in turn can be used to control the output of the laser.
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patent: 4653058 (1987-03-01), Akiba et al.
patent: 4674100 (1987-06-01), Kobayashi
patent: 4692207 (1987-09-01), Bouadma et al.
patent: 4802182 (1989-01-01), Thornton et al.
patent: 4947400 (1990-08-01), Dutta
Connell Neville
Paoli Thomas L.
Scifres Doanld R.
Thornton Robert L.
Davie James W.
Xerox Corporation
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