Apparatus and method for detecting defects arising as a result o

Details Apparatus and method for detecting defects arising as a result o Apparatus and method for detecting defects arising as a result o

1995-11-03

1998-01-27

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 324719, 324718, 437 8, G01R 3102

Patent

active

057125716

ABSTRACT:
A probe card tester for detecting defects occurring as a result of integrated circuit processing of a substrate having a plurality of space to conductors with a contact at each end of each conductor, includes: a probe card tester including a set of parallel resistors for connecting at least one in parallel with each conductor and a set of series resistors for connecting together the ends of the conductors to form a series resistance and a number of probe elements, one corresponding to each end of each conductor, for interconnecting the parallel and series resistors with the conductors for detecting defects bridging the conductors.

REFERENCES:
patent: 3480856 (1969-11-01), Scott
patent: 3728616 (1973-04-01), Cheek
patent: 4835466 (1989-05-01), Maly
patent: 5051690 (1991-09-01), Maly
patent: 5514974 (1996-05-01), Bouldin

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