Measuring and testing – Speed – velocity – or acceleration – Angular rate using wave or beam motion
Reexamination Certificate
2011-03-01
2011-03-01
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using wave or beam motion
C073S504040
Reexamination Certificate
active
07895892
ABSTRACT:
A rotation sensor has a substrate with a first surface and a second surface. A shear-wave transparent mirror is arranged on the first surface of the substrate, and a shear-wave isolator is arranged above the shear-wave transparent mirror, the shear-wave transparent mirror and the shear-wave isolator being arranged separated from each other to define a Coriolis zone there between. A bulk-acoustic-wave resonator is arranged above the shear-wave isolator, and a shear-wave detector is arranged on the substrate in a direction, in which a shear-wave generated by the bulk-acoustic-wave resonator upon rotation propagates.
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Infineon - Technologies AG
Kwok Helen C.
Slater & Matsil L.L.P.
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