Apparatus and method for depositing charge on a semiconductor wa

Details Apparatus and method for depositing charge on a semiconductor wa Apparatus and method for depositing charge on a semiconductor wa

1995-07-07

1997-01-14

Berman, Jack I.

Radiant energy

Corona irradiation

Charging of objects

250324, 361224, H01T 1904

Patent

active

055942474

ABSTRACT:
A conductive screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by first applying a surplus of one charge to the wafer and then depositing an opposite polarity charge until the potential of the wafer equals the potential of the screen.

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