Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1993-07-20
1999-05-25
Talbot, Brian K.
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
427563, 427564, 427562, 427567, C23C 1600
Patent
active
059068612
ABSTRACT:
A borophosphosilicate glass is deposited on a substrate (50) by heating the substrate (50), and contacting the substrate with a mixture of the gases tetramethylcyclotetrasiloxane, trimethylborate, trimethylphosphite, and oxygen, without the presence of a carrier gas. The first three of the gases are produced from liquid sources by controlled vaporization and flow. The gases react at the heated substrate (50) to deposit the glass upon the substrate. In a reactor (52) for depositing the glass, the tetramethylcyclotetrasiloxane and trimethylborate are introduced at a gas inlet location (79), and the trimethylphosphite and oxygen are heated and introduced at another gas inlet location (90). The tetramethylcyclotetrasiloxane and trimethylborate mixture flows toward the location where the trimethylphosphite and oxygen are introduced, and whereat the gases are mixed. This gaseous mixture flows past the heated substrate (50) to deposit the glass thereon.
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Mack Brian
Mc Arthur Warren
Lenzen, Jr. G. H.
Raytheon Company
Schubert W. C.
Talbot Brian K.
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