Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Patent
1998-02-19
1999-08-31
Bueker, Richard
Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
118724, 118726, 118729, C23C 1600
Patent
active
059451637
ABSTRACT:
Apparatus (12, 12a) and a method for depositing a material on a substrate (G) utilizes a distributor (22) including a heated permeable member (24) through which a carrier gas and a material are passed to provide a vapor that is deposited on a conveyed substrate. The permeable member (24) is tubular and has an electrical voltage applied along its length to provide the heating, and the carrier gas and the material as a powder are introduced into the tubular permeable member for flow outwardly therefrom as the vapor. A shroud (34) extending around the tubular permeable member (24) has an opening (36) through which the vapor flows for the deposition. In one embodiment of apparatus (12), the vapor is deposited on an upwardly facing surface (56) of the substrate, while another embodiment of the apparatus (12a) deposits the vapor on a downwardly facing surface (54) of the substrate.
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Cox Steven M.
Dorer Gary L.
Kahle Terence D.
McMaster Harold A.
Powell Ricky C.
Bueker Richard
First Solar LLC
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