Radiant energy – Ionic separation or analysis – With sample supply means
Reexamination Certificate
2011-03-22
2011-03-22
Kim, Robert (Department: 2881)
Radiant energy
Ionic separation or analysis
With sample supply means
C250S281000, C250S282000, C250S283000
Reexamination Certificate
active
07910882
ABSTRACT:
An apparatus for secondary ion mass spectrometry is provided having a target surface for supporting a sample on the target surface and an ion source configured to direct a beam of primary ions toward the sample to sputter secondary ions and neutral particles from the sample, A first chamber having an inlet provides gas to maintain high pressure at the sample for cooling the secondary ions and neutral particles, the high pressure being in the range of about 10−3to about 1000 Torr. A method of secondary ion mass spectrometry is provided having a target surface for supporting a sample, directing a beam of primary ions toward the sample to sputter secondary ions and neutral particles from the sample, and providing a high pressure at the sample for cooling the secondary ions and neutral particles, the high pressure being in the range of about 10−3to about 1000 Torr.
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Bereskin & Parr LLP / S.E.N.C.R.L., s.r.l.
DH Technologies Development PTE. Ltd.
Kim Robert
Logie Michael J
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