Electric heating – Heating devices – With power supply and voltage or current regulation or...
Patent
1996-06-18
1998-12-08
Paschall, Mark H.
Electric heating
Heating devices
With power supply and voltage or current regulation or...
219494, 165 804, 437248, H05B 102
Patent
active
058473661
ABSTRACT:
The present invention is an apparatus and method for controlling the temperature of a heat generating device. The invention is particularly adaptable to controlling the temperature of an integrated circuit under test. In one embodiment the invention involves the use of a bellows having a heat slug disposed at one end that is adapted to engage a surface of the heat generating device. The bellows is compliant and includes a cavity containing a heat transfer medium. The bellows cavity is in fluid communication with a heat transfer medium reservoir. Heat is transferred from the heat generating device by engaging the heat slug with a surface of the heat generating device and applying a force to the bellows. The compliant nature of the bellows provides the temperature control apparatus with a self-planarizing feature that maximizes the contact surface area between the heat slug and heat generating device.
REFERENCES:
patent: 4138692 (1979-02-01), Meeker et al.
patent: 4297190 (1981-10-01), Garrett
patent: 4527620 (1985-07-01), Pedersen et al.
patent: 5050036 (1991-09-01), Oudick et al.
patent: 5593509 (1997-01-01), Zuppero et al.
Intel Corporation
Paschall Mark H.
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