Pumps – Processes – Of pumping one fluid by contact or entrainment with another
Patent
1977-08-29
1980-03-04
Croyle, Carlton R.
Pumps
Processes
Of pumping one fluid by contact or entrainment with another
219272, 219499, 219501, 219502, 417154, F04F 908
Patent
active
041915127
ABSTRACT:
A predetermined pressure ratio is maintained between a foreline and a load port of a vacuum diffusion pump including a bath of oil that is vaporized by a heater. A property of the pump is sensed to derive a signal indicative of the pressure ratio. The signal is compared with a set point value to derive an error signal that controls the amount of power continuously supplied by the heater to the oil bath. The sensed property can be the RMS power supplied by the heater, the heat supplied to the bath, or the density of vaporized fluid in the pump.
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Blumle Leo J.
Hablanian Marsbed
O'Neal, III Charles D.
Berkowitz Edward H.
Cole Stanley Z.
Croyle Carlton R.
Herbert Leon F.
Look Edward
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