Electricity: motive power systems – Reciprocating or oscillating motor
Reexamination Certificate
2011-07-12
2011-07-12
Masih, Karen (Department: 2837)
Electricity: motive power systems
Reciprocating or oscillating motor
C318S135000
Reexamination Certificate
active
07977897
ABSTRACT:
The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode. In addition, at least one detector is present which is suitable for the contactless detection of at least one deflection position and which is connected to an electronic evaluation and control unit to influence the electrical voltage potential difference between the deflectable element and the counter-electrode(s) in dependence of a specific deflection position.
REFERENCES:
patent: 6788842 (2004-09-01), Sink et al.
patent: 2002/0081060 (2002-06-01), Margalit et al.
patent: 2003/0042406 (2003-03-01), Charbon
patent: 2003/0174376 (2003-09-01), Sane et al.
patent: 2004/0174757 (2004-09-01), Garverick et al.
English translation of the International Preliminary Report on Patentability issued in connection with International Application No. PCT/DE2006/000674, from which the present application U.S. Appl. No. 12/243,308, is a continuation.
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung
Gauthier & Connors LLP
Masih Karen
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