Apparatus and method for controlling fluid in a micromachined bo

Details Apparatus and method for controlling fluid in a micromachined bo Apparatus and method for controlling fluid in a micromachined bo

1998-09-25

2000-12-12

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

251 11, F27D 1100, F16K 3100

Patent

active

061602434

ABSTRACT:
A micromachined fluid control apparatus includes a micromachined boiler with a thermally conductive housing that has a housing exterior surface and a housing interior surface. The housing interior surface defines an interior void that has a fluid positioned within it. A heat source is incorporated with the housing exterior surface. The heat source selectively generates heat that is conducted through the thermally conductive housing so as to selectively expand the fluid in a predetermined manner. A load resistor may be positioned within the thermally conductive housing. Current may be driven through the load resistor in a predetermined manner to further control the selective expansion of the fluid.

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