Abrading – Abrading process – Abradant supplying
Patent
1999-04-06
2000-04-11
Banks, Derris Holt
Abrading
Abrading process
Abradant supplying
451 87, 451 5, B24B 719, B24B 730
Patent
active
060482567
ABSTRACT:
The present invention provides a continuous slurry delivery system for use with a polishing apparatus employing a slurry. The continuous slurry delivery system comprises a mixing chamber, slurry component tanks, a chemical parameter sensor system, and a control system. Each of the slurry component tanks contains a different slurry component and is in fluid connection with the mixing chamber to deliver a required rate of the different slurry component to the mixing chamber. The chemical parameter sensor system is coupled to the mixing chamber and configured to sense a chemical property of the slurry. The control system is coupled to the chemical parameter sensor system and is configured to introduce at least one of the slurry components at a given rate to the mixing chamber.
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Obeng Yaw S.
Schultz Laurence D.
Banks Derris Holt
Lucent Technologies - Inc.
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