Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-11-14
2006-11-14
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S765010
Reexamination Certificate
active
07135875
ABSTRACT:
The invention relates to methods for positioning of a substrate140and contacting of the test object301for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder130. The substrate is positioned relative to the optical axis. A contact unit150is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.
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Applied Materials GmbH
Karlsen Ernest
Patterson & Sheridan L.L.P.
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