Apparatus and method for conditioning a contact surface of a...

Abrading – Abrading process – With tool treating or forming

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C451S053000, C451S443000, C451S444000

Reexamination Certificate

active

07001254

ABSTRACT:
Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an end-effector having a conditioning surface configured to engage the contact surface of the processing pad and a plurality of microstructures on the conditioning surface. The microstructures can be arranged in a pattern corresponding to a desired pattern of microfeatures on the contact surface of the processing pad. In several embodiments, the microstructures are raised elements projecting from the conditioning surface and/or depressions in the conditioning surface. The condition surface can also be smooth. The conditioning device can also include a heater coupled to the end-effector for heating the processing pad.

REFERENCES:
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 5020283 (1991-06-01), Tuttle
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5216843 (1993-06-01), Breivogel et al.
patent: 5222329 (1993-06-01), Yu
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5314843 (1994-05-01), Yu et al.
patent: 5372673 (1994-12-01), Stager et al.
patent: 5399234 (1995-03-01), Yu et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5522965 (1996-06-01), Chisholm et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5609718 (1997-03-01), Meikle
patent: 5616069 (1997-04-01), Walker et al.
patent: 5618381 (1997-04-01), Doan et al.
patent: 5624303 (1997-04-01), Robinson
patent: 5643048 (1997-07-01), Iyer
patent: 5645471 (1997-07-01), Strecker
patent: 5645682 (1997-07-01), Skrovan
patent: 5650619 (1997-07-01), Hudson
patent: 5655951 (1997-08-01), Meikle et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5663797 (1997-09-01), Sandhu
patent: 5665656 (1997-09-01), Jairath
patent: 5679065 (1997-10-01), Henderson
patent: 5681423 (1997-10-01), Sandhu et al.
patent: 5690540 (1997-11-01), Elliott et al.
patent: 5698455 (1997-12-01), Meikle et al.
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5725417 (1998-03-01), Robinson
patent: 5736427 (1998-04-01), Henderson
patent: 5738567 (1998-04-01), Manzonie et al.
patent: 5747386 (1998-05-01), Moore
patent: 5769697 (1998-06-01), Nishio
patent: 5775983 (1998-07-01), Shendon et al.
patent: 5779521 (1998-07-01), Muroyama et al.
patent: 5779522 (1998-07-01), Walker et al.
patent: 5782675 (1998-07-01), Southwick
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795218 (1998-08-01), Doan et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5798302 (1998-08-01), Hudson et al.
patent: 5801066 (1998-09-01), Meikle
patent: 5823855 (1998-10-01), Robinson
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5846336 (1998-12-01), Skrovan
patent: 5855804 (1999-01-01), Walker
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5879222 (1999-03-01), Robinson
patent: 5879226 (1999-03-01), Robinson
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5894852 (1999-04-01), Gonzales et al.
patent: 5895550 (1999-04-01), Andreas
patent: 5910043 (1999-06-01), Manzonie et al.
patent: 5910846 (1999-06-01), Sandhu
patent: 5934980 (1999-08-01), Koos et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5954912 (1999-09-01), Moore
patent: 5957750 (1999-09-01), Brunelli
patent: 5972792 (1999-10-01), Hudson
patent: 5975994 (1999-11-01), Sandhu et al.
patent: 5976000 (1999-11-01), Hudson
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5989470 (1999-11-01), Doan et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6022266 (2000-02-01), Bullard et al.
patent: 6036586 (2000-03-01), Ward
patent: 6039633 (2000-03-01), Chopra
patent: 6040245 (2000-03-01), Sandhu et al.
patent: 6046111 (2000-04-01), Robinson
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6057602 (2000-05-01), Hudson et al.
patent: 6077785 (2000-06-01), Andreas
patent: 6083085 (2000-07-01), Lankford
patent: 6106351 (2000-08-01), Raina et al.
patent: 6108092 (2000-08-01), Sandhu
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6114706 (2000-09-01), Meikle et al.
patent: 6120354 (2000-09-01), Koos et al.
patent: 6124207 (2000-09-01), Robinson et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6186870 (2001-02-01), Wright et al.
patent: 6187681 (2001-02-01), Moore
patent: 6190494 (2001-02-01), Dow
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6191864 (2001-02-01), Sandhu
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203407 (2001-03-01), Robinson
patent: 6203413 (2001-03-01), Skrovan
patent: 6206754 (2001-03-01), Moore
patent: 6206759 (2001-03-01), Agarwal et al.
patent: 6206769 (2001-03-01), Walker
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 6227955 (2001-05-01), Custer et al.
patent: 6234877 (2001-05-01), Koos et al.
patent: 6234878 (2001-05-01), Moore
patent: 6238270 (2001-05-01), Robinson
patent: 6238273 (2001-05-01), Southwick
patent: 6244944 (2001-06-01), Elledge
patent: 6250994 (2001-06-01), Chopra et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6271139 (2001-08-01), Alwan et al.
patent: 6273101 (2001-08-01), Gonzales et al.
patent: 6273800 (2001-08-01), Walker et al.
patent: 6284660 (2001-09-01), Doan
patent: 6287879 (2001-09-01), Gonzales et al.
patent: 6290572 (2001-09-01), Hofmann
patent: 6296557 (2001-10-01), Walker
patent: 6301006 (2001-10-01), Doan
patent: 6306008 (2001-10-01), Moore
patent: 6306014 (2001-10-01), Walker et al.
patent: 6309282 (2001-10-01), Wright et al.
patent: 6312558 (2001-11-01), Moore
patent: 6319420 (2001-11-01), Dow
patent: 6323046 (2001-11-01), Agarwal
patent: 6325702 (2001-12-01), Robinson
patent: 6328632 (2001-12-01), Chopra
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6331139 (2001-12-01), Walker et al.
patent: 6331488 (2001-12-01), Doan et al.
patent: 6343977 (2002-02-01), Peng et al.
patent: 6350180 (2002-02-01), Southwick
patent: 6350691 (2002-02-01), Lankford
patent: 6352466 (2002-03-01), Moore
patent: 6352470 (2002-03-01), Elledge
patent: 6361400 (2002-03-01), Southwick
patent: 6387289 (2002-05-01), Wright
patent: 6428386 (2002-08-01), Bartlett
patent: 6439986 (2002-08-01), Myoung et al.
patent: 6500054 (2002-12-01), Ma et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and method for conditioning a contact surface of a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for conditioning a contact surface of a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for conditioning a contact surface of a... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3635864

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.