Apparatus and method for conditioning a contact surface of a...

Details Apparatus and method for conditioning a contact surface of a... Apparatus and method for conditioning a contact surface of a...

2006-04-04

2006-04-04

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S053000, C451S443000, C451S444000

Reexamination Certificate

active

07021996

ABSTRACT:
Conditioning devices, systems and methods for conditioning a contact surface of a processing pad used in processing microelectronic workpieces. One embodiment of a conditioning device comprises an end-effector having a conditioning surface configured to engage the contact surface of the processing pad and a plurality of microstructures on the conditioning surface. The microstructures can be arranged in a pattern corresponding to a desired pattern of microfeatures on the contact surface of the processing pad. In several embodiments, the microstructures are raised elements projecting from the conditioning surface and/or depressions in the conditioning surface. The condition surface can also be smooth. The conditioning device can also include a heater coupled to the end-effector for heating the processing pad.

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