Apparatus and method for collecting residual products for...

Details Apparatus and method for collecting residual products for... Apparatus and method for collecting residual products for...

2006-04-27

2010-11-23

Hill, Jr., Robert J (Department: 1797)

Gas separation: processes

Heat exchanging

Condensing to solid

C095S288000, C095S291000, C055S434200, C055S434300, C062S055500, C438S759000

Reexamination Certificate

active

07837770

ABSTRACT:
An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a heating section connected to a process chamber of the semiconductor processing or flat panel display processing device. The heating section is designed to preheat the reaction by-products to prevent or reduce liquefaction of the reaction by-products. A by-product pile up section then rapidly cools the heated reaction by-products to convert the same into a solid form.

REFERENCES:
patent: 4252545 (1981-02-01), Haferkorn
patent: 6206971 (2001-03-01), Umotoy et al.
patent: 6241793 (2001-06-01), Lee et al.
patent: 6884284 (2005-04-01), Jensen
patent: 2004/0069224 (2004-04-01), Lin et al.
patent: 2006/0169411 (2006-08-01), Han et al.

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