Apparatus and method for coating polyimide layer

Details Apparatus and method for coating polyimide layer Apparatus and method for coating polyimide layer

2011-07-19

2011-07-19

Edwards, Laura (Department: 1792)

Coating apparatus

Projection or spray type

With projector heating, cleaning or conditioning

C118S304000, C347S022000, C347S028000, C347S033000, C134S184000, C134S186000

Reexamination Certificate

active

07980196

ABSTRACT:
An apparatus for coating a polyimide layer includes a printing table in which a substrate is provided, an inkjet head having an injection surface with nozzles for injecting a polyimide liquid onto the substrate, a polyimide liquid supply tank filled with the polyimide liquid, an ultrasonic cleaner in which a cleaning liquid for cleaning the inkjet head is stored for cleaning the inkjet head with vibrations in the cleaning liquid generated by applying an ultrasonic signal, and a wiper for wiping an injection surface of the inkjet head.

REFERENCES:
patent: 6183058 (2001-02-01), Sharma et al.
patent: 6676242 (2004-01-01), Yun
patent: 7073886 (2006-07-01), Nakamura
patent: 2002/0140762 (2002-10-01), Sharma et al.
patent: 8-150710 (1996-06-01), None
patent: 2003-136013 (2003-05-01), None
patent: 2003-266719 (2003-09-01), None
patent: 2003-311231 (2003-11-01), None
patent: 2003-340340 (2003-12-01), None
patent: 2004-247498 (2004-09-01), None
patent: 2005-205329 (2005-08-01), None
Office Action issued in corresponding Japanese Application No. 2006-354347.

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