Apparatus and method for cleaning substrate surface by use of Oz

Details Apparatus and method for cleaning substrate surface by use of Oz Apparatus and method for cleaning substrate surface by use of Oz

1997-01-31

1999-12-07

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219393, 219408, F27B 514

Patent

active

059987669

ABSTRACT:
This invention relates to a processing apparatus having an object holding means for holding an object to be processed, a processing chamber for housing the object to be processed and the object holding means, an ultraviolet irradiation means for irradiating ultraviolet rays on the object to be processed, an ultraviolet irradiation means chamber incorporating the ultraviolet irradiation means, an opening/closing means for opening/closing an opening for allowing the processing chamber to communicate with the ultraviolet irradiation means chamber, a first exhaust means for exhausting ozone which is produced upon irradiation of the ultraviolet ray by the ultraviolet irradiation means and present in the processing chamber, and a second exhaust means for exhausting ozone produced in the ultraviolet irradiation means chamber, and a processing method using the same.

REFERENCES:
patent: 4581520 (1986-04-01), Vu
patent: 4654509 (1987-03-01), Robinson
patent: 5127365 (1992-07-01), Koyama
patent: 5314574 (1994-05-01), Takahashi
patent: 5414244 (1995-05-01), Imahashi
patent: 5433791 (1995-07-01), Brewer
patent: 5480492 (1996-01-01), Udagawa et al.
Catalog by SEN Engineering Co., Ltd. on Ultraviolet Cleaning/Ultraviolet Surface Modification available in 1992.

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