X-ray or gamma ray systems or devices – Specific application – Fluorescence
Patent
1996-09-13
1998-05-19
Wong, Don
X-ray or gamma ray systems or devices
Specific application
Fluorescence
378 44, 378 84, G01N 23223
Patent
active
057546207
ABSTRACT:
An apparatus and method are presented for determining the identity and quantity of elements embedded within a thin film. A radioisotopic source produces a beam of primary x-rays which impinge at near-grazing angles upon a sample consisting of a thin film and an underlying semiconductor substrate. The beam of primary x-rays cause the emission of characteristic secondary x-ray photons from the thin film of the sample. These secondary x-ray photons are detected by a detector positioned above the sample. The detected X-ray photons are counted and their energies are determined, allowing for the determination of the identity and quantity of elements within the thin film.
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Hossain Tim Z.
Tiffin Donald A.
Advanced Micro Devices , Inc.
Daffer Kevin L.
Wong Don
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