Cleaning and liquid contact with solids – Processes – Work handled in bulk or groups
Patent
1996-05-03
1997-04-08
Stinson, Frankie L.
Cleaning and liquid contact with solids
Processes
Work handled in bulk or groups
1341041, 134902, 451287, 451388, B08B 1102
Patent
active
056183542
ABSTRACT:
An apparatus and method for cleaning and reconditioning a wafer carrier backing film. The apparatus comprises a flat perforated surface plate with a perforated film or perforated embossed glass plate on its surface; a backing plate connected to the surface plate which is fitted for connection to a cleaning solution supply and a vacuum source; and a contacting mechanism for extension/retraction of the surface plate until it contacts the carrier backing film. Following a wafer unload cycle, the carrier backing film is reconditioned by spraying a cleaning solution at the carrier backing film so as to rinse slurry deposits from the film material; extending the surface plate to make sealed contact with the wafer carrier; initiating a vacuum condition to press the carrier backing film and draw out slurry residuals and excessive water content from within the film; and retracting the surface plate to reconstitute the film as the material draws in surrounding air to break the vacuum condition.
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International Business Machines - Corporation
Mortinger, Esq. Alison
Stinson Frankie L.
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