Apparatus and method for capacitive measurement of materials

Details Apparatus and method for capacitive measurement of materials Apparatus and method for capacitive measurement of materials

2008-05-06

2008-05-06

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C356S632000, C324S230000

Reexamination Certificate

active

11328031

ABSTRACT:
Method for measuring thicknesses of a film, a foil or a material layer with a measuring head which is spaced away from the film and with which a capacitive thickness measurement is performed, in which an optical distance measurement is performed with a distance measuring device and a distance determined by the optical distance measurement is used in determining the film thickness in the capacitive thickness measurement.

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