Data processing: measuring – calibrating – or testing – Calibration or correction system – Fluid or fluid flow measurement
Reexamination Certificate
2006-11-14
2006-11-14
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Fluid or fluid flow measurement
Reexamination Certificate
active
07136767
ABSTRACT:
A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.
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Ambrosina Jesse
Kottenstette Nicholas
Shajii Ali
Lau Tung S.
McDermott Will & Emery LLP
MKS Instruments Inc.
Nghiem Michael
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