Apparatus and method for calibration of mass flow controller

Data processing: measuring – calibrating – or testing – Calibration or correction system – Fluid or fluid flow measurement

Reexamination Certificate

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Reexamination Certificate

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07136767

ABSTRACT:
A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.

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