Abrading – Precision device or process - or with condition responsive... – By optical sensor
Patent
1998-02-27
2000-03-21
Eley, Timothy V.
Abrading
Precision device or process - or with condition responsive...
By optical sensor
451 41, 451278, B24B 4900
Patent
active
06039630&
ABSTRACT:
A calibration apparatus and method for a polishing machine includes a ferrule surrounding a polishing pad and a plurality of sensors attached to the ferrule. Each of the sensors is directed at a location where optical fibers extending downwardly from a leveling device contact the polishing pad. The sensors are infrared sensors that detect a heat signature generated by friction at the contact point between the optical fibers and the polishing pad as the polishing pad spins and revolves relative to the leveling device. The heat signature that is generated corresponds to the pressure existing between the optical fibers and the polishing pad.
REFERENCES:
patent: 5038524 (1991-08-01), Moulin
patent: 5403227 (1995-04-01), Franklin et al.
patent: 5447464 (1995-09-01), Franklin et al.
patent: 5503590 (1996-04-01), Saitoh et al.
patent: 5516328 (1996-05-01), Kawada
patent: 5547418 (1996-08-01), Takahashi
patent: 5643064 (1997-07-01), Grinderslev et al.
patent: 5674114 (1997-10-01), Miller et al.
patent: 5711701 (1998-01-01), Grinderslev et al.
patent: 5720653 (1998-02-01), Miller et al.
patent: 5743787 (1998-04-01), Ishiyama et al.
Chandler William Keith
Csipkes Andrei
Mahmood Waqar
Shah Nadir
Ciena Corporation
Daisak Daniel N.
Eley Timothy V.
Nguyen Dung Van
Soltz David L.
LandOfFree
Apparatus and method for calibrating pressure existing between o does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for calibrating pressure existing between o, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for calibrating pressure existing between o will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-726003