Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1989-11-03
1990-11-06
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 731, 324158F, 324158P, G01R 3500, G01R 3102
Patent
active
049689312
ABSTRACT:
A method of burning in integrated circuits on a semiconductor wafer is provided, wherein a burn-in chamber having a flexible membrane probe which is sized so that it can couple to a plurality of contact pads on the semiconductor wafer at one time. The semiconductor wafer is heated to a predetermined burn-in temperature and a bladder which lies behind the membrane probe is inflated so that the membrane probe couples to each of the plurality of contact pads on the wafer. The membrane probe is coupled to an exercise circuit which exercises all of the integrated circuits on the wafer in parallel for a predetermined time.
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Belyeu et al; "Dynamic Burn-In System"; IBM Technical Disclosure Bulletin; vol. 22, No. 8A, Jan. 1980; pp. 3065-3068.
Littlebury Hugh W.
Simmons Marion I.
Barbee Joe E.
Eisenzopf Reinhard J.
Langley Stuart T.
Motorola Inc.
Nguyen Vinh P.
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